By Wiley P. Kirk

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Silicon and molybdenum) can reflect soft (14 nm wavelength) X-ray s wit h efficiencies exceeding 50% thus opening up the possibility of engineering both reflective projection optics and reflective masks. Experimental results demonstrating 50 nm lines and spaces have already been reported but the field of view has been very limited; less than 100 ìð é diameter (17)(Fig. 4). Projection of electron images from stencil masks and with scattering masks has also been reported (15,16); each is essentially runnin g a transmission electron microscope backwards.

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