By John H. Lau ... [et al.]

Creation to MEMS --
Advanced MEMS packaging --
Enabling applied sciences for complex MEMS packaging --
Advanced MEMS wafer-level packaging --
Optical MEMS packaging : communications --
Optical MEMS packaging : bubble change --
Optical MEMS : microbolometer packaging --
Bio-MEMS packaging --
Biosensor packaging --
Accelerometer packaging --
Radiofrequency MEMS switches --
RF MEMS tunable capacitors and tubable band-pass filters --
Advanced packaging of RF MEMS units

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Additional resources for Advanced MEMS packaging

Example text

Savage, MN), Curtis, Harlan L. (Champlin, MN), “MEMS device packaging methods,” February 17, 2009. Chen, Jian (Richardson, TX), Rajagopal, Ramasubramaniam (Richardson, TX), “Nanocomposites and methods thereto,” January 20, 2009. Introduction to MEMS 7,465,600 7,463,404 7,456,497 7,452,800 7,449,784 7,449,358 7,449,356 7,443,563 7,436,054 7,425,749 Michael, Don (Monmoth, OR), Rossman, Mari J. (Corvallis, OR), Bower, Bradley (Junction City, OR), Haluzak, Charles Craig (Corvallis, OR), Stemer, John R.

Jr. (US), US2006227002 (A1)—2006-10-12. 129. “MEMS packaging structure and methods,” Haluzak, Charles C. (US), Pollard, Jeffrey R. (US), US2006228869 (A1)—200610-12. 130. “Reactive nano-layer material for MEMS packaging,” Lu, Daoqiang (US), Heck, John (US), US2006220223 (A1)—200610-05. 131. “Method of fabrication of AI/GE bonding in a wafer packaging environment and a product produced therefrom,” Nasiri, Steven S. (US), Flannery, Anthony Francis, Jr. (US), WO2006101769 (A2)—2006-09-28. 132. “Structure and process for packaging RF MEMS and other devices,” Schaper, Leonard W.

La Crescenta, CA), “Bi-stable micro-actuator and optical switch,” September 7, 2004. Steele, Daniel W. (Clay, NY), Chovan, Joseph L. (North Syracuse, NY), “Micro eletro-mechanical component and system architecture,” August 24, 2004. Lomas, Stuart John (Edmonton, CA), McLaughlin, Dean Edward (Baltimore, MD), “Integrated optical channel,” August 10, 2004. Saia, Richard Joseph (Niskayuna, NY), Durocher, Kevin Matthew (Waterford, NY), Kapusta, Christopher James (Duanesburg, NY), Introduction to MEMS 6,771,859 6,767,764 6,760,500 6,759,590 6,723,379 6,716,767 6,696,645 6,696,343 6,661,069 Nielsen, Matthew Christian (Schenectady, NY), “Microelectromechanical system device packaging method,” August 10, 2004.

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